Frank Chen

Q: What is Frank Chen email address?

Email Frank Chen at frank.chen@asmr.com. This email is the most updated Frank Chen email found in 2026.

Q: How to contact Frank Chen?

To contact Frank Chen send an email to frank.chen@asmr.com.

Senior process enigneer and project owner at ASM | Taiwan

About Frank Chen

Frank Chen currently serves as a Senior Process Engineer and Project Owner at ASM, where he plays a pivotal role in high-volume manufacturing (HVM) support and project management for Plasma-Enhanced Atomic Layer Deposition (PEALD) processes. His expertise is particularly focused on advanced semiconductor applications, including the ramp-up of cutting-edge technologies at TSMC's F15 facility, specifically for nodes N10 and N7. Frank's work encompasses a variety of applications such as hard masks, liners, gap-fill, and spacers, utilizing materials like HT/LT-SiO, B/PSG, and TiO.

In his role, Frank is not only responsible for ensuring seamless HVM operations but also for troubleshooting complex issues that arise during the manufacturing process. He has developed a comprehensive issue history table that summarizes past challenges and outlines actionable plans to mitigate future occurrences. This proactive approach not only enhances operational efficiency but also fosters a culture of continuous improvement within the team.

Additionally, Frank's expertise extends to GaN-based blue and UV LED epitaxy, where he leverages his deep understanding of PEALD processes involving SiO, TiO, BPSG, and SiN. His skills in product development, process integration, and manufacturing enable him to lead research and development projects that push the boundaries of semiconductor technology. With a keen focus on innovation and a commitment to excellence, Frank Chen is a vital asset to ASM, driving forward the company's mission to deliver state-of-the-art solutions in the semiconductor industry.

Frank Chen Work